A,The Gas Sensing Performance of ZnO/Si Nanostructured Thin Films Synthesis by Spin-Coating
Keywords:
gas sensorAbstract
Abstract: In this work, ethanol, ammonium hydroxide, and a zinc acetate-containing precursor solution were used to create zinc oxide (ZnO) nanostructured films on silicon substrates using the spin-coating technique. The study also investigated how several layers affect structural, optical, and sensing properties. X-ray revealed that ZnO nanoparticles had a hexagonal structure phase and were polycrystalline, with the (002) plane as the preferred orientation parallel to the substrate surface. According to AFM analysis, as the number of layers increased, the grain size decreased, and the surface roughness increased. The energy gap increased from 3.31 to 3.39 eV as the number of layers increased, according to UV-visible analysis. Sensitivity of the films to ammonia gas in a 50 ppm concentration range was assessed at working temperatures ranging from room temperature to 150 °C. Nanostructured ZnO thin films must be produced for efficient and reasonably priced gas sensing applications. A synergistic effect was observed in this study: reducing grain size, increasing operating temperature, and enhancing surface roughness improved sensitivity, reaching up to 140.7% when seven layers were applied.
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