M. Kadhim M, Abbas QA. Plasma Characterization in Planar Magnetron Sputtering Systems Using Optical Emission Spectroscopy and Langmuir Probe Diagnostics. JJP [Internet]. 2026 Jun. 30 [cited 2026 Jul. 14];19(2):187-99. Available from: https://jjp.yu.edu.jo/index.php/jjp/article/view/476