KNÁPEK, A.; DROZD, M.; MATĚJKA, M.; CHLUMSKÁ, J.; KRÁL, S.; KOLAŘÍK, V. Automated System for Optical Inspection of Defects in Resist-coated Non-patterned Wafer. Jordan Journal of Physics , [S. l.], v. 13, n. 2, 2025. Disponível em: https://jjp.yu.edu.jo/index.php/jjp/article/view/695. Acesso em: 14 may. 2025.