M. KADHIM, M.; ABBAS, Q. A. Plasma Characterization in Planar Magnetron Sputtering Systems Using Optical Emission Spectroscopy and Langmuir Probe Diagnostics. Jordan Journal of Physics , [S. l.], v. 19, n. 2, p. 187–199, 2026. Disponível em: https://jjp.yu.edu.jo/index.php/jjp/article/view/476. Acesso em: 14 jul. 2026.